Patent · US Active

Systems, apparatus, and methods for an improved load port backplane

US10541165B2 · kind B2 · utility

1Cited by

1References

14Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Paul B. Reuter · Austin, US
Douglas B. Baumgarten · Round Rock, US

Key dates

Filing date	Nov 10, 2016
Grant date	Jan 21, 2020
Priority date	—
Expiry date	Jan 13, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67775
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Embodiments provide systems, apparatus, and methods for an improved load port that includes a backplane assembly supporting a docking tray and a substrate carrier opener, wherein the backplane assembly includes a backplane; a leveling block coupleable to an equipment front end module (EFEM); a conical hole adjustment assembly coupled between the leveling block and the backplane; and a slotted hole adjustment assembly coupled between the leveling block and the backplane. The conical hole adjustment assembly includes a conical hole block coupled to the leveling block at a first end; a threaded block coupled to the backplane; and an adjustment bolt coupled to the conical hole block and the threaded block. Numerous additional aspects are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.