Douglas B. Baumgarten
18Patents
2h-index
25Co-inventors
50Inventor score
Filing activity: Aug 11, 2014 → Sep 25, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10192765B2 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Electricity | 9 | Active |
| US11189511B2 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Electricity | 4 | Active |
| US10453726B2 | Electronic device manufacturing load port apparatus, systems, and methods | Electricity | 2 | Active |
| US11993978B2 | Seal mechanism for load port doors | Electricity | 1 | Active |
| US10541165B2 | Systems, apparatus, and methods for an improved load port backplane | Electricity | 1 | Active |
| US12142508B2 | Factory interface robots usable with integrated load locks | Electricity | 0 | Active |
| US11640915B2 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Electricity | 0 | Active |
| US12297691B2 | Seal mechanism for load port doors | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11842913B2 | Seal mechanisms for load ports | Electricity | 0 | Active |
| US12074045B2 | Prevention of contamination of substrates during gas purging | Emerging Cross-Sectional Technologies | 0 | Active |
| US11276594B2 | Systems, apparatus, and methods for an improved load port backplane | Electricity | 0 | Active |
| US11810805B2 | Prevention of contamination of substrates during gas purging | Emerging Cross-Sectional Technologies | 0 | Active |
| US12159802B2 | Shortened load port for factory interface | Physics | 0 | Active |
| US11061417B2 | Selectable-rate bottom purge apparatus and methods | Physics | 0 | Active |
| US11450539B2 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Electricity | 0 | Active |
| US11282724B2 | Substrate processing systems, apparatus, and methods with factory interface environmental controls | Electricity | 0 | Active |
| US11610794B2 | Side storage pods, equipment front end modules, and methods for operating the same | Performing Operations; Transporting | 0 | Active |
| US11171029B2 | Electronic device manufacturing load port apparatus, systems, and methods | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.