Patent · US Active

Integrated circuit products with gate structures positioned above elevated isolation structures

US10566328B2 · kind B2 · utility

0Cited by
1References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 2018
Grant dateFeb 18, 2020
Priority date
Expiry dateFeb 26, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/31144
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

One illustrative integrated circuit product disclosed herein includes a plurality of FinFET transistor devices, a plurality of fins, each of the fins having an upper surface, and an elevated isolation structure having an upper surface that is positioned at a level that is above a level of the upper surface of the fins. In this example, the product also includes a first gate structure having an axial length in a direction corresponding to the gate width direction of the transistor devices, wherein at least a portion of the axial length of the first gate structure is positioned above the upper surface of the elevated isolation structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.