Patent · US Active

Intelligent pre-scan in scanning transmission charged particle microscopy

US10665419B2 · kind B2 · utility

0Cited by
5References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 21, 2019
Grant dateMay 26, 2020
Priority date—
Expiry dateFeb 21, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/2804
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.