Integrated circuit tester probe contact liner

US10670653B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Charles L. Arvin · Savannah, US
• David M. Audette · Webster, US
• Dennis R. Conti · South Burlington, US
• Brian M. Erwin · Lagrangeville, US
• Grant Wagner · Jericho, US

Key dates

• Filing date: May 15, 2018
• Grant date: Jun 2, 2020
• Expiry date: Aug 11, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2886
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An integrated circuit (IC) device tester includes contact probes. A liner is formed upon the contact probes. The liner includes a matrix of an electrical conductor and glass. The conductor of the liner provides for the contact probe to be electrically connected to the IC device contact. The glass of the liner prevents IC device contact material adhering thereto. The liner may be formed by applying a conductive glass frit upon a probe card that includes the probe contacts and locally thermally conditioning the conductive glass frit upon contact probes. By locally thermally conditioning the conductive glass frit, the temperature of the probe card may be maintained below a critical temperature that damages the probe card.