Gas flow guide design for uniform flow distribution and efficient purge

US10697062B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Chien-Teh Kao · Sunnyvale, US
• Jeffrey A. Kho · Union City, US
• Xiangxin Rui · Campbell, US
• Jianhua Zhou · Campbell, US
• Shinichi Kurita · San Jose, US
• ShouQian Shao · Fremont, US
• Guangwei Sun · Santa Clara, US

Key dates

• Filing date: Jul 11, 2018
• Grant date: Jun 30, 2020
• Expiry date: Jul 11, 2038

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/45591
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments described herein provide a chamber having a gas flow inlet guide to uniformly deliver process gas and a gas flow outlet guide to effectively purge process gasses and reduce purge time. The chamber includes a chamber body having a process gas inlet and a process gas outlet, a lid assembly, a process gas inlet and a process gas outlet configured to be in fluid communication with a processing region in the chamber, a gas flow inlet guide disposed in the process gas inlet, and a gas flow outlet guide disposed in the process gas outlet. The gas flow inlet guide includes a flow modulator and at least two first inlet guide channels having first inlet guide channel areas that are different. The gas flow outlet guide includes at least two first outlet guide channels having first outlet guide channel areas that are different.