Inventor · Campbell, CA, US

Jianhua Zhou

109Patents
10h-index
198Co-inventors
83Inventor score

Filing activity: Jul 11, 1997 → Apr 16, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US8911553B2 Quartz showerhead for nanocure UV chamber Emerging Cross-Sectional Technologies 457 Active
US10950477B2 Ceramic heater and esc with enhanced wafer edge performance Electricity 264 Active
US9157730B2 PECVD process Physics 46 Active
US8772682B2 Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber Electricity 41 Active
US7904732B2 Encrypting and decrypting database records Physics 24 Active
US8197636B2 Systems for plasma enhanced chemical vapor deposition and bevel edge etching Electricity 22 Active
US5877414A Vehicle road load simulation using effective road profile Physics 19 Expired
US8552346B2 Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber Electricity 18 Active
US10480074B2 Apparatus for radical-based deposition of dielectric films Electricity 13 Active
US8274017B2 Multifunctional heater/chiller pedestal for wide range wafer temperature control Electricity 11 Active
US9458537B2 PECVD process Physics 8 Active
US10403535B2 Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system Electricity 7 Active
US9816187B2 PECVD process Physics 7 Active
US9725806B2 Multi-zone pedestal for plasma processing Electricity 5 Active
US8097082B2 Nonplanar faceplate for a plasma processing chamber Emerging Cross-Sectional Technologies 4 Active
US8778813B2 Confined process volume PECVD chamber Electricity 4 Active
US9556507B2 Yttria-based material coated chemical vapor deposition chamber heater Electricity 3 Active
US10125422B2 High impedance RF filter for heater with impedance tuning device Electricity 3 Active
US9840777B2 Apparatus for radical-based deposition of dielectric films Electricity 3 Active
US9384950B2 Chamber coatings Electricity 3 Active
US8666255B2 Circuits, architectures, apparatuses, systems, and methods for merging of management and data signals, and for recovery of a management signal Electricity 3 Active
US8291858B2 Movable jig for silicon-based thin film solar cell Emerging Cross-Sectional Technologies 3 Active
US8282734B2 Methods to improve the in-film defectivity of PECVD amorphous carbon films Chemistry; Metallurgy 3 Active
US6258929A Alarm related peptides and nucleic acids and diagnosis using them Physics 3 Expired
US9537412B2 Direct current voltage conversion device and clamping circuit Emerging Cross-Sectional Technologies 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.