Probe systems for testing a device under test

US10698002B2 · kind B2 · utility

Assignee

• FormFactor Beaverton, Inc. · US

Inventors

• Christopher Storm · Hillsboro, US
• Michael E. Simmons · Colton, US
• Bryan Bolt · Beaverton, US
• Gavin Neil Fisher · Fenny Compton, GB
• Anthony Lord · Banbury, GB
• Kazuki Negishi · Hillsboro, US

Key dates

• Filing date: Sep 27, 2018
• Grant date: Jun 30, 2020
• Expiry date: Jan 2, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68785
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Probe systems for testing a device under test are disclosed herein. The probe systems include a platen that defines an upper surface, an opposed lower surface, and a platen aperture. The probe systems also include a chuck that defines a support surface configured to support a device under test. The probe systems further include a lower enclosure extending from the lower surface of the platen and an upper enclosure extending from the upper surface of the platen. The upper enclosure includes a side wall that defines a side wall aperture, and the side wall and the platen define an intersection angle of at least 30 degrees and at most 60 degrees. The probe systems also include a manipulator, a probe shaft arm, a probe assembly, a test head, and an electrical conductor.