Quick disconnect resistance temperature detector assembly for rotating pedestal

US10704142B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Muhannad Mustafa · Milpitas, US
• Muhammad M. Rasheed · San Jose, US
• Mario D. Sanchez · San Jose, US
• Yu Chang · San Jose, US
• William Kuang · San Francisco, US
• Vinod Konda Purathe · Bengaluru, IN
• Manjunatha Koppa · Kanchinakote, IN

Key dates

• Filing date: Jul 27, 2017
• Grant date: Jul 7, 2020
• Expiry date: Jul 30, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G01K13/08
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.