Inventor · San Jose, CA, US

Mario D. Sanchez

10Patents
1h-index
15Co-inventors
43Inventor score

Filing activity: Jun 9, 2015 → Jul 20, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US11384432B2 Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate Electricity 2 Active
US10704142B2 Quick disconnect resistance temperature detector assembly for rotating pedestal Physics 1 Active
US11415147B2 Pumping liner for improved flow uniformity Mechanical Engineering; Lighting; Heating 0 Active
US11767590B2 ALD cycle time reduction using process chamber lid with tunable pumping Chemistry; Metallurgy 0 Active
US11732358B2 High temperature chemical vapor deposition lid Chemistry; Metallurgy 0 Active
US11719255B2 Pumping liner for improved flow uniformity Mechanical Engineering; Lighting; Heating 0 Active
US12054826B2 ALD cycle time reduction using process chamber lid with tunable pumping Chemistry; Metallurgy 0 Active
US11932939B2 Lids and lid assembly kits for atomic layer deposition chambers Electricity 0 Active
US11447866B2 High temperature chemical vapor deposition lid Chemistry; Metallurgy 0 Active
US10755947B2 Methods of increasing selectivity for selective etch processes Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.