Mario D. Sanchez
10Patents
1h-index
15Co-inventors
43Inventor score
Filing activity: Jun 9, 2015 → Jul 20, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11384432B2 | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate | Electricity | 2 | Active |
| US10704142B2 | Quick disconnect resistance temperature detector assembly for rotating pedestal | Physics | 1 | Active |
| US11415147B2 | Pumping liner for improved flow uniformity | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11767590B2 | ALD cycle time reduction using process chamber lid with tunable pumping | Chemistry; Metallurgy | 0 | Active |
| US11732358B2 | High temperature chemical vapor deposition lid | Chemistry; Metallurgy | 0 | Active |
| US11719255B2 | Pumping liner for improved flow uniformity | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12054826B2 | ALD cycle time reduction using process chamber lid with tunable pumping | Chemistry; Metallurgy | 0 | Active |
| US11932939B2 | Lids and lid assembly kits for atomic layer deposition chambers | Electricity | 0 | Active |
| US11447866B2 | High temperature chemical vapor deposition lid | Chemistry; Metallurgy | 0 | Active |
| US10755947B2 | Methods of increasing selectivity for selective etch processes | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.