Semiconductor reaction chamber showerhead
US10714315B2 · kind B2 · utility
4Cited by
1,524References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2012 |
| Grant date | Jul 14, 2020 |
| Priority date | — |
| Expiry date | Mar 24, 2034 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45574
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A showerhead including a body having an opening, a first plate positioned within the opening and having a plurality of slots, a second plate positioned within the opening and having a plurality of slots, and wherein each of the first plate plurality of slots are concentrically aligned with the second plate plurality of slots.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.