Online calibration for repetition rate dependent performance variables
US10727642B2 · kind B2 · utility
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Key dates
| Filing date | Sep 11, 2017 |
| Grant date | Jul 28, 2020 |
| Priority date | — |
| Expiry date | Sep 11, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/2256
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.