Patent · US Active

Repairable rigid test probe card assembly

US10732202B2 · kind B2 · utility

1Cited by

4References

19Claims

0Family size

Assignee

GlobalFoundries Inc. · KY

Inventors

Craig M. Bocash · Winooski, US
David L. Gardell · Saint Albans, US
Peter W. Neff · Stowe, US

Key dates

Filing date	Mar 29, 2016
Grant date	Aug 4, 2020
Priority date	—
Expiry date	Feb 13, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/07378
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A repairable rigid test probe system includes an annular gimbal supported by an annular gimbal bearing of a probe card assembly, a test substrate seated and aligned within the annular gimbal, a rigid die including thick periphery and a thin center containing an array of through holes that is aligned above the test substrate, and an array of rigid probes inserted into each of the array of through holes, where each rigid probe includes: a tail end that contacts a connection on a facing surface of the test substrate, a collar limiting a distance of insertion, and a tip that contacts a corresponding contact on a facing surface of a device under test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.