Liquid processing apparatus, liquid processing method, and storage medium for liquid process
US10734251B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2013 |
| Grant date | Aug 4, 2020 |
| Priority date | — |
| Expiry date | Jun 22, 2036 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B2205/503
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A filtration efficiency, which is similar to the filtration efficiency obtained when a plurality of filters are provided, can be obtained by one filter, and decrease in throughput can be prevented. Based on a control signal from a control unit 101, a resist liquid L is sucked into a pump 70 through a filter. A part of the resist liquid sucked in the pump is discharged from a discharge nozzle 7. The remaining resist liquid is returned to a supply conduit 51b on a primary side of the filter. A process is synthesized by adding a replenishment amount equal to the discharge amount to the return amount. The discharge of the synthesized process liquid and the filtration thereof by the filter are performed the number of times corresponding to a rate between the discharge amount and the return amount.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.