Method of controlling ion energy distribution using a pulse generator with a current-return output stage
US10791617B2 · kind B2 · utility
51Cited by
125References
20Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 9, 2020 |
| Grant date | Sep 29, 2020 |
| Priority date | — |
| Expiry date | Jan 9, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2242/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments of this disclosure describe an electrode biasing scheme that enables maintaining a nearly constant sheath voltage and thus creating a mono-energetic IEDF at the surface of the substrate that consequently enables a precise control over the shape of IEDF and the profile of the features formed in the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.