Overlay control with corrections for lens aberrations
US10809633B1 · kind B1 · utility
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2References
4Claims
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Key dates
| Filing date | Sep 5, 2019 |
| Grant date | Oct 20, 2020 |
| Priority date | — |
| Expiry date | Sep 5, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/705
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Structures for detecting and correcting an overlay inaccuracy and methods of detecting and correcting an overlay inaccuracy. An overlay target includes a first plurality of features arranged along a first longitudinal axis in a first line-space pattern having a first line width, and a second plurality of features arranged along a second longitudinal axis in a second line-space pattern having a second line width that is less than the first line width. The second longitudinal axis is aligned substantially parallel to the first longitudinal axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.