Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability
US10825708B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2012 |
| Grant date | Nov 3, 2020 |
| Priority date | — |
| Expiry date | Jul 6, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Process kit components for use with a substrate support of a process chamber are provided herein. In some embodiments, a process kit ring may include a ring shaped body having an outer edge, an inner edge, a top surface and a bottom, wherein the outer edge has a diameter of about 12.473 inches to about 12.479 inches and the inner edge has a diameter of about 11.726 inches to about 11.728 inches, and wherein the ring shaped body has a height of about 0.116 to about 0.118 inches; and a plurality of protrusions disposed on the top surface of the ring shaped body, each of the plurality of protrusions disposed symmetrically about the ring shaped body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.