Variable corrector of a wave front
US10852247B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 31, 2017 |
| Grant date | Dec 1, 2020 |
| Priority date | — |
| Expiry date | Dec 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70616
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical inspection apparatus, including: an optical metrology tool configured to measure structures, the optical metrology tool including: an electromagnetic (EM) radiation source configured to direct a beam of EM radiation along an EM radiation path; and an adaptive optical system disposed in a portion of the EM radiation path and configured to adjust a shape of a wave front of the beam of EM radiation, the adaptive optical system including: a first aspherical optical element; a second aspherical optical element adjacent the first aspherical optical element; and an actuator configured to cause relative movement between the first optical element and the second optical element in a direction different from a beam axis of the portion of the EM radiation path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.