Showerhead assembly and components thereof
US10858737B2 · kind B2 · utility
4Cited by
1,749References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2014 |
| Grant date | Dec 8, 2020 |
| Priority date | — |
| Expiry date | Aug 27, 2035 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4401
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Showerhead assemblies, gas distribution plates, and systems including the same are disclosed. Exemplary showerhead assemblies include a gas distribution plate. Exemplary gas distribution plates include apertures designed to direct a flow of gas and to reduce stagnation of gas on surfaces of the plates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.