David Marquardt
20Patents
5h-index
28Co-inventors
69Inventor score
Filing activity: Aug 31, 2001 → Jan 10, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9117866B2 | Apparatus and method for calculating a wafer position in a processing chamber under process conditions | Electricity | 488 | Active |
| US6758939B2 | Laminated wear ring | Performing Operations; Transporting | 11 | Expired |
| US7229339B2 | CMP apparatus and method | Performing Operations; Transporting | 7 | Expired |
| US10662527B2 | Manifolds for uniform vapor deposition | Electricity | 7 | Active |
| US6796887B2 | Wear ring assembly | Performing Operations; Transporting | 5 | Expired |
| US7354335B2 | CMP apparatus and load cup mechanism | Emerging Cross-Sectional Technologies | 4 | Expired |
| US10872804B2 | Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination | Electricity | 4 | Active |
| US10858737B2 | Showerhead assembly and components thereof | Chemistry; Metallurgy | 4 | Active |
| US11773485B2 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Chemistry; Metallurgy | 1 | Active |
| US11473195B2 | Semiconductor processing apparatus and a method for processing a substrate | Chemistry; Metallurgy | 1 | Active |
| US11584990B2 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Chemistry; Metallurgy | 1 | Active |
| US11377737B2 | Manifolds for uniform vapor deposition | Electricity | 0 | Active |
| US12416081B2 | Manifolds for uniform vapor deposition | Electricity | 0 | Active |
| US12319999B2 | Refillable large volume solid precursor sublimation vessel | Chemistry; Metallurgy | 0 | Active |
| US11834740B2 | Apparatus, system, and method for generating gas for use in a process chamber | Performing Operations; Transporting | 0 | Active |
| US11859281B2 | Ampoule for a semiconductor manufacturing precursor | Electricity | 0 | Active |
| US12018365B2 | Semiconductor processing apparatus and a method for processing a substrate | Chemistry; Metallurgy | 0 | Active |
| US11578406B2 | Ampoule for a semiconductor manufacturing precursor | Electricity | 0 | Active |
| US12241594B2 | Constant headspace ampoule | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12054825B2 | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.