System, method and computer program product for classifying defects
US10921334B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2018 |
| Grant date | Feb 16, 2021 |
| Priority date | — |
| Expiry date | Apr 5, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An examination system, a method of obtaining a training set for a classifier, and a non-transitory computer readable medium, the method comprising: upon receiving in a memory device object inspection results comprising data indicative of potential defects, each potential defect of the potential defects associated with a multiplicity of attribute values defining a location of the potential defect in an attribute space: sampling by the processor a first set of defects from the potential defects, wherein the defects within the first set are dispersed independently of a density of the potential defects in the attribute space; and obtaining by the processor a training defect sample set comprising the first set of defects and data or parameters representative of the density of the potential defects in the attribute space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.