Substrate holder having integrated temperature measurement electrical devices
US10978323B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2019 |
| Grant date | Apr 13, 2021 |
| Priority date | — |
| Expiry date | Oct 12, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate holder includes a base plate, a bond layer disposed over the base plate, and a ceramic layer disposed over the bond layer. The ceramic layer has a top surface including an area configured to support a substrate. A number of temperature measurement electrical devices are attached to the ceramic layer. Electrically conductive traces are embedded within the ceramic layer and positioned and routed to electrically connect with one or more of electrical contacts of the number of temperature measurement electrical devices. Electrical wires are disposed to electrically contact the electrically conductive traces. The electrical wires extend from the ceramic layer through the bond layer and through the base plate to a control circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.