Low force wafer test probe

US11029334B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• David M. Audette · Webster, US
• Dennis R. Conti · South Burlington, US
• Marc D. Knox · Mechanicsville, US
• Grant Wagner · Jericho, US

Key dates

• Filing date: Aug 9, 2019
• Grant date: Jun 8, 2021
• Expiry date: Aug 9, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/06733
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe includes a pedestal and at least one feature extending from the pedestal to engage a surface of a corresponding contact at a position offset from a central longitudinal axis of the contact. The pedestal includes a cavity and the feature can include one or more blades that extend from a periphery of the cavity to a central longitudinal axis of the pedestal. The three blades are configured to engage the surface of the contact. The three blades can be positioned within the cavity to provide a 120-degree rotational symmetry about the central longitudinal axis of the pedestal.