Patent · US Active

Method of classifying defects in a semiconductor specimen and system thereof

US11037286B2 · kind B2 · utility

1Cited by

5References

20Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Assaf Asbag · Gdera, IL
Ohad Shaubi · Yavne, IL
Kirill Savchenko · Lod, IL
Shiran Gan-Or · Kiryat Ono, IL
Boaz Cohen · al-Araqeeb, IL
Zeev Zohar · Migdal, IL

Key dates

Filing date	Sep 28, 2017
Grant date	Jun 15, 2021
Priority date	—
Expiry date	Apr 13, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30148
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

There are provided a classifier and a method of classifying defects in a semiconductor specimen. The classifier enables assigning each class to a classification group among three or more classification groups with different priorities. Classifier further enables setting purity, accuracy and/or extraction requirements separately for each class, and optimizing the classification results in accordance with per-class requirements. During training, the classifier is configured to generate a classification rule enabling the highest possible contribution of automated classification while meeting per-class quality requirements defined for each class.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.