Apparatus for increasing flux from an ampoule
US11059061B2 · kind B2 · utility
0Cited by
4References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2018 |
| Grant date | Jul 13, 2021 |
| Priority date | — |
| Expiry date | Mar 2, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. The inlet port has a showerhead that the end within the container. The showerhead has at least two angled nozzles to direct the flow of gas within the cavity so that the gas flow is not perpendicular to the surface of a liquid within the ampoule.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.