Inventor · San Jose, CA, US

Daping Yao

15Patents
3h-index
32Co-inventors
56Inventor score

Filing activity: Jun 1, 2011 → Jun 17, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9460959B1 Methods for pre-cleaning conductive interconnect structures Mechanical Engineering; Lighting; Heating 113 Active
US9364871B2 Method and hardware for cleaning UV chambers Chemistry; Metallurgy 4 Active
US9506145B2 Method and hardware for cleaning UV chambers Chemistry; Metallurgy 3 Active
US10600685B2 Methods to fill high aspect ratio features on semiconductor substrates with MOCVD cobalt film Electricity 2 Active
US8664126B2 Selective deposition of polymer films on bare silicon instead of oxide surface Electricity 2 Active
US11854794B2 Semiconductor cleaning equipment and method for cleaning through vias using the same Electricity 0 Active
US10752990B2 Apparatus and methods to remove residual precursor inside gas lines post-deposition Emerging Cross-Sectional Technologies 0 Active
US10640870B2 Gas feedthrough assembly Chemistry; Metallurgy 0 Active
US10453657B2 Apparatus for depositing metal films with plasma treatment Electricity 0 Active
US11059061B2 Apparatus for increasing flux from an ampoule Electricity 0 Active
US10283345B2 Methods for pre-cleaning conductive materials on a substrate Mechanical Engineering; Lighting; Heating 0 Active
US8492177B2 Methods for quantitative measurement of a plasma immersion process Electricity 0 Active
US11133155B2 Apparatus for depositing metal films with plasma treatment Electricity 0 Active
US11628456B2 Apparatus for increasing flux from an ampoule Electricity 0 Active
US9478437B2 Methods for repairing low-k dielectrics using carbon plasma immersion Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.