Apparatus of plural charged-particle beams
US11062877B2 · kind B2 · utility
1Cited by
10References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 3, 2020 |
| Grant date | Jul 13, 2021 |
| Priority date | — |
| Expiry date | Jan 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multi-beam apparatus for observing a sample with high resolution and high throughput and in flexibly varying observing conditions is proposed. The apparatus uses a movable collimating lens to flexibly vary the currents of the plural probe spots without influencing the intervals thereof, a new source-conversion unit to form the plural images of the single electron source and compensate off-axis aberrations of the plural probe spots with respect to observing conditions, and a pre-beamlet-forming means to reduce the strong Coulomb effect due to the primary-electron beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.