Quartz component with protective coating
US11087961B2 · kind B2 · utility
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31Claims
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Assignee
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Key dates
| Filing date | Mar 2, 2018 |
| Grant date | Aug 10, 2021 |
| Priority date | — |
| Expiry date | Oct 19, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32715
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A quartz structure includes a protective layer comprising yttrium oxide. The quartz structure may be fabricated by: (a) receiving a quartz structure; and (b) coating the quartz structure with a protective layer comprising yttrium oxide to form a part to be used in the plasma reactor. The part has a size and shape adapted for forming a window or injector in a plasma reactor. The protective layer does not substantially change the size or shape of the quartz structure. The part may be installed in the plasma reactor at a location where, during operation, a plasma will contact or be proximate to the part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.