Robin KOSHY
5Patents
1h-index
11Co-inventors
40Inventor score
Filing activity: Aug 21, 2012 → Oct 21, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8900665B2 | Method of forming hardmask layer with alternating nanolayers | Emerging Cross-Sectional Technologies | 7 | Active |
| US12249490B2 | Single crystal metal oxide plasma chamber component | Electricity | 0 | Active |
| US9947558B2 | Method for conditioning silicon part | Electricity | 0 | Active |
| US9028918B2 | Forming a hardmask capping layer | Emerging Cross-Sectional Technologies | 0 | Active |
| US11087961B2 | Quartz component with protective coating | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.