Patent · US Active

Ion source with single-slot tubular cathode

US11127557B1 · kind B1 · utility

2Cited by

7References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Bon-Woong Koo · Andover, US
Frank Sinclair · Quincy, US
Alexandre Likhanskii · Malden, US
Svetlana B. Radovanov · Marblehead, US
Alexander S. Perel · Danvers, US
Graham Wright · Newburyport, US
Jay T. Scheuer · Rowley, US
Daniel R. Tieger · Gloucester, US
You Chia Li · Reading, US
Jay Johnson · Gloucester, US
Tseh-Jen Hsieh · Rowley, US
Ronald F. Johnson · Gloucester, US

Key dates

Filing date	Mar 12, 2020
Grant date	Sep 21, 2021
Priority date	—
Expiry date	Mar 14, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/082
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An ion source including a chamber housing defining an ion source chamber and including an extraction plate on a front side thereof, the extraction plate having an extraction aperture formed therein, and a tubular cathode disposed within the ion source chamber and having a slot formed in a front-facing semi-cylindrical portion thereof disposed in a confronting relationship with the extraction aperture, wherein a rear-facing semi-cylindrical portion of the tubular cathode directed away from the extraction aperture is closed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.