Charged particle beam source and a method for assembling a charged particle beam source
US11189451B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Dec 2, 2020 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Dec 2, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/03
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.