Inventor · Kidron, IL

Guy Eytan

14Patents
1h-index
35Co-inventors
50Inventor score

Filing activity: Jul 16, 2004 → Jul 21, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US10217621B2 Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber Electricity 6 Active
US10910204B2 Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber Electricity 0 Active
US8804299B2 Electrostatic chuck and a method for supporting a wafer Electricity 0 Active
US10716197B2 System, computer program product, and method for dissipation of an electrical charge Electricity 0 Active
US11049704B1 Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber Electricity 0 Active
US11810765B2 Reactive particles supply system Electricity 0 Active
US10249472B2 Charged particle beam device, charged particle beam influencing device, and method of operating a charged particle beam device Electricity 0 Active
US11189451B2 Charged particle beam source and a method for assembling a charged particle beam source Electricity 0 Active
US10886092B2 Charged particle beam source and a method for assembling a charged particle beam source Electricity 0 Active
US11264202B2 Generating three dimensional information regarding structural elements of a specimen Electricity 0 Active
US11921063B2 Lateral recess measurement in a semiconductor specimen Electricity 0 Active
US7235794B2 System and method for inspecting charged particle responsive resist Electricity 0 Expired
US11694869B2 Evaluating a contact between a wafer and an electrostatic chuck Electricity 0 Active
US11355309B2 Sensor for electron detection Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.