Patent · US Active

High quality factor embedded resonator wafers

US11209398B2 · kind B2 · utility

0Cited by

0References

16Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Chuang-Chia Lin · Diamond Bar, US
Surajit Kumar · Sunnyvale, US
Upendra Ummethala · Cupertino, US

Key dates

Filing date	Oct 9, 2019
Grant date	Dec 28, 2021
Priority date	—
Expiry date	Mar 19, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH03H9/2405
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Embodiments disclosed herein include diagnostic substrates and methods of using such substrates. In an embodiment, a diagnostic substrate comprises a substrate, and a device layer over the substrate. In an embodiment, the diagnostic substrate further comprises a resonator in the device layer. In an embodiment, the resonator comprises a cavity, a cover layer over the cavity, and electrodes within the cavity for driving and sensing resonance of the cover layer. In an embodiment, the diagnostic substrate further comprises a reflector surrounding a perimeter of the resonator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.