Patent · US Active

Integrated circuit with optical tunnel

US11239152B2 · kind B2 · utility

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0References

11Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Otto A. Torreiter · Echterdingen, DE
Thomas Gentner · Eppelheim, DE
Martin Eckert · Metzingen, DE

Key dates

Filing date	Sep 4, 2019
Grant date	Feb 1, 2022
Priority date	—
Expiry date	Sep 10, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/303
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The invention relates to an integrated circuit with an active transistor area and a plurality of wiring layers arranged above the active transistor area. At least one optical device is integrated in the active transistor area. The optical device is electrically connected with at least one of the wiring layers. At least one optical tunnel extends from the at least one optical device through the plurality of wiring layers to a surface of an uppermost wiring layer of the plurality of wiring layers facing away from the active transistor area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.