High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods

US11244844B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Paul B. Reuter · Austin, US
• Murali Narasimhan · San Jose, US
• Amulya L. Athayde · Palo Alto, US
• Patrick D. Pannese · Lynnfield, US
• Dean C. Hruzek · Cedar Park, US
• Nir Merry · Mountain View, US

Key dates

• Filing date: Oct 18, 2019
• Grant date: Feb 8, 2022
• Expiry date: Nov 30, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67766
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

In some embodiments, a side storage pod apparatus of an equipment front end module (EFEM) includes a side storage enclosure having a surface configured to couple to a side wall of a body of the equipment front end module, and an opening configured to receive substrates from the equipment front end module. The EFEM further includes a side storage chamber within the side storage enclosure having a plurality of support members configured to support substrates thereon. The EFEM further includes a plenum chamber provided proximate the side storage chamber, the plenum chamber being a separate chamber from the side storage chamber and an exhaust port coupled to the plenum chamber.