Inventor · Mountain View, CA, US

Nir Merry

52Patents
10h-index
88Co-inventors
81Inventor score

Filing activity: Apr 26, 1989 → Nov 22, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US4946460A Apparatus for cryosurgery Human Necessities 269 Expired
US5801940A Fault-tolerant HVAC system Emerging Cross-Sectional Technologies 139 Expired
US5602758A Installation link-up procedure Mechanical Engineering; Lighting; Heating 90 Expired
US5706190A Fault-tolerant HVAC system Emerging Cross-Sectional Technologies 81 Expired
US5720743A Thermally insulating surgical probe Human Necessities 53 Expired
US5590642A Control methods and apparatus for gas-fired combustors Mechanical Engineering; Lighting; Heating 50 Expired
US5772501A Indoor environmental conditioning system and method for controlling the circulation of non-conditioned air Mechanical Engineering; Lighting; Heating 40 Expired
US8894344B2 Vertical wafer buffering system Emerging Cross-Sectional Technologies 33 Active
US9029242B2 Damage isolation by shaped beam delivery in laser scribing process Electricity 23 Active
US8314371B2 Rapid thermal processing chamber with micro-positioning system Electricity 14 Active
US5648722A Apparatus and method for determining the state of an electrical switch within an HVAC system Physics 9 Expired
US7833351B2 Batch processing platform for ALD and CVD Emerging Cross-Sectional Technologies 9 Active
US10192765B2 Substrate processing systems, apparatus, and methods with factory interface environmental controls Electricity 9 Active
US8900889B2 Rapid thermal processing chamber with micro-positioning system Electricity 8 Active
US8104951B2 Temperature uniformity measurements during rapid thermal processing Physics 8 Active
US7748542B2 Batch deposition tool and compressed boat Electricity 8 Active
US9147592B2 Linked vacuum processing tools and methods of using the same Electricity 7 Active
US9390950B2 Rapid thermal processing chamber with micro-positioning system Electricity 7 Active
US9698074B2 Heated substrate support with temperature profile control Emerging Cross-Sectional Technologies 6 Active
US10196845B2 Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal Electricity 6 Active
US8880210B2 Methods and apparatus for processing substrates using model-based control Electricity 5 Active
US8150242B2 Use of infrared camera for real-time temperature monitoring and control Electricity 5 Active
US9508375B2 Modification of magnetic properties of films using ion and neutral beam implantation Electricity 5 Active
US8317449B2 Multiple substrate transfer robot Electricity 4 Active
US11244844B2 High flow velocity, gas-purged, side storage pod apparatus, assemblies, and methods Electricity 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.