Method of forming a plurality of gratings
US11247298B2 · kind B2 · utility
4Cited by
5References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2019 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Dec 26, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F3/011
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments of the present application generally relate to methods for forming a plurality of gratings. The methods generally include depositing a material over one or more protected regions of a waveguide combiner disposed on a substrate, the material having a thickness inhibiting removal of a grating material disposed on the waveguide combiner when an ion beam is directed toward the substrate, and directing the ion beam toward the substrate. The methods disclosed herein allow for formation of a plurality of gratings in one or more unprotected regions, while no gratings are formed in the protected regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.