Clog detection in a multi-port fluid delivery system
US11251047B2 · kind B2 · utility
0Cited by
9References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 29, 2018 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Jan 15, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments of the present disclosure provide for apparatus used to detect clogs in a fluid delivery system during CMP processes and methods of detecting clogs in a fluid delivery system during CMP processes. In particular, embodiments herein provide a flow splitter manifold configured to enable monitoring of the pressure of the polishing fluid disposed therein. Monitoring the fluid pressure in the flow splitter manifold enables the detection of clogs in the delivery lines and/or dispense nozzles that inhibit and/or prevent the flow of polishing fluid therethrough or therefrom.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.