Systems and methods for transfer of micro-devices
US11251226B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 22, 2020 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Jun 22, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/95136
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for positioning micro-devices on a substrate includes one or more supports to hold a donor substrate and a destination substrate, an adhesive dispenser to deliver adhesive on micro-devices on the donor substrate, a transfer device including a transfer surface to transfer the micro-devices from the donor substrate to the destination substrate, and a controller. The controller is configured to operate the adhesive dispenser to selectively dispense the adhesive onto selected micro-devices on the donor substrate based on a desired spacing of the selected micro-devices on the destination substrate. The controller is configured to operate the transfer device such that the transfer surface engages the adhesive on the donor substrate to cause the selected micro-devices to adhere to the transfer surface and the transfer surface then transfers the selected micro-devices from the donor substrate to the destination substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.