Patent · US Active

Systems, apparatus, and methods for an improved load port backplane

US11276594B2 · kind B2 · utility

0Cited by

6References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Paul B. Reuter · Austin, US
Douglas B. Baumgarten · Round Rock, US

Key dates

Filing date	Jan 14, 2020
Grant date	Mar 15, 2022
Priority date	—
Expiry date	Feb 28, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67775
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method is for sealing a backplane component of a load port system to an equipment front end module (EFEM). The method includes mounting a leveling block to the EFEM. A conical hole adjustment assembly is coupled between a first distal end of the leveling block and the backplane component. The method further includes rotating a first leveling adjustment bolt in the conical hole adjustment assembly to align the backplane component with the EFEM.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.