Advanced in-line part average testing

US11293970B2 · kind B2 · utility

Assignee

• KLA Corporation · US

Inventors

• David W. Price · Austin, US
• Robert J. Rathert · Mechanicsville, US
• Kara L. Sherman · Santa Clara, US
• John Robinson · Austin, US
• Mike Von Den Hoff · Altenkirchen, DE
• Barry Saville
• Robert Cappel · Pleasanton, US
• Oreste Donzella · San Ramon, US
• Naema Bhatti · Milpitas, US
• Thomas Groos · Mengerskirchen, DE
• Teng-Song Lim · Singapore, SG
• Doug Sutherland · Milpitas, US

Key dates

• Filing date: Nov 23, 2020
• Grant date: Apr 5, 2022
• Expiry date: Nov 23, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2831
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An inspection system may include a controller communicatively coupled to one or more in-line sample analysis tools including, but not limited to, an inspection tool or a metrology tool. The controller may identify defects in a population of dies based on data received from at least one of the one or more in-line sample analysis tools, assign weights to the identified defects indicative of predicted impact of the identified defects on reliability of the dies using a weighted defectivity model, generate defectivity scores for the dies in the population by aggregating the weighted defects in the respective dies in the population, and determine a set of outlier dies based on the defectivity scores for the dies in the population, wherein at least some of the set of outlier dies are isolated from the population.