Hybridization for characterization and metrology
US11295969B2 · kind B2 · utility
0Cited by
8References
17Claims
0Family size
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Key dates
| Filing date | Nov 27, 2018 |
| Grant date | Apr 5, 2022 |
| Priority date | — |
| Expiry date | Jan 9, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/56
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A computer-implemented method for measuring a parameter of a semiconductor. A non-limiting example of the computer-implemented method includes receiving, using a processor, a raw signal from a first tool representing a measured parameter of a semiconductor device. The method also receives, using the processor, data on the measured parameter from a second tool, and calculates, using the processor, the measured parameter based on the data received from the second tool and on a constraint based on the raw signal from the first tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.