Substrate holder and method for bonding two substrates
US11315813B2 · kind B2 · utility
2Cited by
11References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2015 |
| Grant date | Apr 26, 2022 |
| Priority date | — |
| Expiry date | Nov 9, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L24/80
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.