Apparatus and system including high angle extraction optics
US11361935B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 7, 2020 |
| Grant date | Jun 14, 2022 |
| Priority date | — |
| Expiry date | Nov 7, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3151
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An extraction plate for an ion beam system. The extraction plate may include an insulator body that includes a peripheral portion, to connect to a first side of a plasma chamber, and further includes a central portion, defining a concave shape. As such, an extraction aperture may be arranged along a first surface of the central portion, where the first surface is oriented at a high angle with respect to the first side. The extraction plate may further include a patterned electrode, comprising a first portion and a second portion, affixed to an outer side of the insulator body, facing away from the plasma chamber, wherein the first portion is separated from the second portion by an insulating gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.