Calibration method and terminal equipment of terahertz frequency band on-wafer S parameter

US11385175B2 · kind B2 · utility

Assignee

• THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION · CN

Inventors

• Yibang Wang · Shijiazhuang, CN
• Aihua Wu · Xinzhai, CN
• Faguo Liang · Shijiazhuang, CN
• Chen Liu · Weihai, CN
• Peng Luan · Shijiazhuang, CN
• Ye Huo · Shijiazhuang, CN
• Jing Sun · Suzhou, CN
• Yanli Li · Los Angeles, US

Key dates

• Filing date: Dec 16, 2020
• Grant date: Jul 12, 2022
• Expiry date: Jan 1, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/3568
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A calibration method includes: acquiring eight error models obtained after a preliminary calibration of a Terahertz frequency band system; based on the eight error models, determining a first mathematical model according to a first S parameter related to a first calibration piece, the first mathematical model comprising parallel crosstalk terms between probes, and determining a second mathematical model according to a second S parameter related to a second calibration piece, the second mathematical model comprising series crosstalk terms between the probes; determining a third mathematical model according to a third S parameter related to a measured piece; and solving and obtaining a Z parameter of the measured piece based on the first mathematical model, the second mathematical model and the third mathematical model, and acquiring an S parameter of the measured piece according to the Z parameter of the measured piece.