Patent · US Active

Systems, apparatus, and methods for an improved load port

US11404297B2 · kind B2 · utility

0Cited by

16References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Luke Bonecutter · Cedar Park, US
David Blahnik · Round Rock, US
Paul B. Reuter · Austin, US

Key dates

Filing date	Nov 9, 2020
Grant date	Aug 2, 2022
Priority date	—
Expiry date	Nov 9, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67778
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A load port system includes an isolation compartment coupled to an equipment front end module (EFEM). Reactive gas is to be removed from the isolation compartment. The load port system further includes an elevator disposed in the isolation compartment. The elevator is coupled to an elevator arm that extends from the isolation compartment into the EFEM through an opening to raise and lower a carrier opener within the EFEM.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.