Substrate susceptor using edge purging

US11404302B2 · kind B2 · utility

Assignee

• ASM IP Holding B.V. · NL

Inventors

• Raj Singu · Phoenix, US
• Todd Robert Dunn · Cave Creek, US
• Carl Louis White · Gilbert, US
• Herbert Terhorst · Amersfoort, NL
• Eric James Shero · Phoenix, US
• Bhushan Zope · Phoenix, US

Key dates

• Filing date: May 15, 2020
• Grant date: Aug 2, 2022
• Expiry date: May 16, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68785
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.