Pumping liner for improved flow uniformity
US11415147B2 · kind B2 · utility
0Cited by
20References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2020 |
| Grant date | Aug 16, 2022 |
| Priority date | — |
| Expiry date | Aug 20, 2040 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D29/62
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Pumping liners for process chambers including a first ring-shaped body and a second ring-shaped body are described. The first ring-shaped body has a first plurality of openings and the second ring-shaped body has a second plurality of openings. The first ring-shaped body and the second ring-shaped body are rotatable relative to each other around a central axis to at least partially overlap the first plurality of openings and the second plurality of openings to change the area of conductance through the openings. Methods of removing gases from a processing chamber are also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.