Ground path systems for providing a shorter and symmetrical ground path
US11434569B2 · kind B2 · utility
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2References
20Claims
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Key dates
| Filing date | May 1, 2019 |
| Grant date | Sep 6, 2022 |
| Priority date | — |
| Expiry date | Mar 9, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32724
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments described herein relate to ground path systems providing a shorter and symmetrical path for radio frequency (RF) energy to propagate to a ground to reduce generation of the parasitic plasma. The ground path system bifurcates the processing volume of the chamber to form an inner volume that isolates an outer volume of the processing volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.