Patent · US Active

Gas distribution plate with UV blocker at the center

US11448977B1 · kind B1 · utility

1Cited by

2References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Kartik Ramaswamy · San Jose, US
Michael D. Willwerth · Campbell, US
Yang Yang · San Diego, US

Key dates

Filing date	Sep 24, 2021
Grant date	Sep 20, 2022
Priority date	—
Expiry date	Sep 24, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3342
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Apparatus for processing substrates can include a gas distribution plate that includes an upper plate and a lower plate and a solid disk between the upper plate and the lower plate. Each of the upper plate and the lower plate has a central region and an outer region surrounding the central region, the central region being solid and the outer region having a plurality of through holes. The upper plate and the lower plate are coaxially aligned along a central axis extending through a center of the central region of the upper plate and a center of the central region of the lower plate. The solid disk is coaxially aligned with the upper plate and the lower plate. The solid disk is configured to block transmission of ultraviolet radiation through the solid disk.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.